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University of the West of Scotland


Microscale Sensors Group
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Labs / Facilities

Lab general view

Fabrication

High precision Dicing SawDicing saw

Lapping / Polishing machineLapping/Polishing machine

Cr-Au sputtering machineSputtering machine

Semi clean area (from left to right - wire bonder, evaporator, optical microscope, surface profiler) Semi-clean area.

R&D and manufacturing of piezo-electric Active Thin Film transducers are done in collaboration with the Thin Film Centre.

CVC machine at the Thin FIlm Centre

Reactive Sputerring

For more information on our Active Thin Film transducers please download our Factsheet here.

Characterisation

Scanning tanks

(Left: manual 250x100x100 - Right: automated 130x70x40cm)

tank2tank1

Microprobing stationMicroprobing station

Laser vibrometerLaser vibrometer

High frequency 3 axes scanner (Repeatability of 0.2μm) 3D scanner animation

Simulation tools

Finite Element Analysis software:
  • PZFlex

Pillar misalignment

  • Atila

Atila simulation

  • COMSOL Multiphysics
  • ANSYS
Harmonic 1-D model
  • SPICE / PSPICE

Pspice