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University of the West of Scotland


Microscale Sensors Group
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Lab and Facilities

Lab general view

Our labs include a wide variety of facilities for Fabrication, Characterisation and Simulation.

Fabrication

High Precision Dicing Saw

Dicing saw

 

Lapping / Polishing machine

Lapping/Polishing machine

 

Cr-Au sputtering machineSputtering machine

 

Semi clean area (from left to right - wire bonder, evaporator, optical microscope, surface profiler) Semi-clean area.

R&D and manufacturing of piezo-electric Active Thin Film transducers are done in collaboration with the Thin Film Centre.

CVC machine at the Thin FIlm CentreReactive Sputerring

For more information on our Active Thin Film transducers please download our Factsheet here.

Characterisation

Microprobing stationMicroprobing station

Laser vibrometerLaser vibrometer

High frequency 3 axes scanner (Repeatability of 0.2μm) 3D scanner animation

Simulation tools

Finite Element Analysis software:
  • PZFlex

Pillar misalignment

  • Atila

Atila simulation

  • COMSOL Multiphysics
  • Ansys
Harmonic 1-D model
  • SPICE / PSPICE

Pspice

 

MSS home 1

MSS home3

MSS home2